Title:
ブレード間隔測定方法
Document Type and Number:
Japanese Patent JP4481597
Kind Code:
B2
Inventors:
Matsubara Masayuki
Kise Taizo
Murayama Yasutaka
Kise Taizo
Murayama Yasutaka
Application Number:
JP2003194524A
Publication Date:
June 16, 2010
Filing Date:
July 09, 2003
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B23Q17/00; B26D7/27; B23Q17/24; B24B27/06; B24B45/00; B26D5/02; H01L21/301
Domestic Patent References:
| JP48003196Y1 | ||||
| JP6244326A | ||||
| JP5253830A | ||||
| JP64016362A | ||||
| JP7276244A | ||||
| JP2001157949A |
Attorney, Agent or Firm:
Miaki Kametani
Tetsuo Kanamoto
Koji Hagiwara
Tetsuo Kanamoto
Koji Hagiwara