Title:
BOARD HANDLING METHOD AND BOARD FRAME USED FOR IT
Document Type and Number:
Japanese Patent JPH08316287
Kind Code:
A
Abstract:
PURPOSE: To make it possible to handle a board without causing a robot hand etc., to touch the board directly, to suppress the attaching of dirt to the board, and to prevent the breakage of the board at the time of conveying and handling it.
CONSTITUTION: A board 1 is conveyed, taken in/out, etc., without being directly touched through the medium of a board frame 2, by a board handling means which sets a board 1 in the recessed parts 3 of the board frame 2 for a board 1 to be set in and causes the frame 2 to hold the board 1, and conveys, takes in/out, etc,. the board 1.
Inventors:
TSUINO YASUHIRO
Application Number:
JP14249395A
Publication Date:
November 29, 1996
Filing Date:
May 16, 1995
Export Citation:
Assignee:
MURATA MANUFACTURING CO
International Classes:
H01L21/677; B25J9/06; H01L21/68; H01L21/683; (IPC1-7): H01L21/68; B25J9/06
Attorney, Agent or Firm:
Nishizawa Hitoshi