Title:
SUBSTRATE HOLD MEMBER
Document Type and Number:
Japanese Patent JP2023146479
Kind Code:
A
Abstract:
To provide a substrate hold member capable of suppressing nonuniformity of adhesiveness between a substrate and a mounting surface, the substrate hold member comprising a shaft.SOLUTION: A substrate hold member 100 comprises a ceramic base material 110. An annular projection 152 in an annular shape and a plurality of projections 156 are provided on a top face 111 of the ceramic base material 110. A shaft 130 including a cylindrical part 131 is bonded to a bottom face 113 of the ceramic base material 110. A circular region Sc, which is concentric with the ceramic base material 110, is provided in a center of the top face 111. A diameter Φc of the circular region Sc is 0.4 times or more as large as an inner diameter Φ1 of the cylindrical part 131 of the shaft 130. An envelope P1 of a top face 156a of the projection 156 in the circular region Sc is a plane, and an envelope P2 of the top face 156a of the projection 156 in an outer region Sout outside of the circular region Sc is a curved surface which is projected upward.SELECTED DRAWING: Figure 1
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Inventors:
HINO MAKOTO
KITABAYASHI TETSUO
SHIMOJIMA HIROMASA
KITABAYASHI TETSUO
SHIMOJIMA HIROMASA
Application Number:
JP2022053674A
Publication Date:
October 12, 2023
Filing Date:
March 29, 2022
Export Citation:
Assignee:
NGK SPARK PLUG CO
International Classes:
H01L21/683
Attorney, Agent or Firm:
Kijuro Kawakita
Masahiro Fujita
Masahiro Fujita