基板処理装置及び画面表示プログラム並びに基板処理装置の表示方法

Title:

基板処理装置及び画面表示プログラム並びに基板処理装置の表示方法

Document Type and Number:

Japanese Patent JP5275606

Kind Code:

B2

Inventors:

Toru Yonebayashi

Application Number:

JP2007266159A

Publication Date:

August 28, 2013

Filing Date:

October 12, 2007

Export Citation:

Assignee:

Hitachi Kokusai Electric Co., Ltd.

International Classes:

H01L21/22; H01L21/02; H01L21/205; H01L21/304; H01L21/3065

Domestic Patent References:

Foreign References:

WO2006104018A1

Attorney, Agent or Firm:

Toru Yui
Aniya Setsuo
Hitoshi Kiyono

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