基板処理装置、制御方法、およびコンピュータプログラム

Japanese Patent JP6373143

B2

PROBLEM TO BE SOLVED: To provide a substrate processing device capable of preventing a substrate from being stagnated in a stagnation inhibition area without depending on a so-called scheduler that performs substrate conveyance control by executing complicated arithmetic processing based on a quantity of information, a control method and a computer program.SOLUTION: A substrate processing device 1 includes: a stagnation inhibition area 200 in which, when a substrate 9 is stagnated, it may cause a processing defect; and a standby buffer 60 that is positioned at a downstream side of the stagnation inhibition area 200 in a direction of conveyance. A line control PC 82 acquires the number of substrates 9 loaded within the stagnation inhibition area 200 and the number of empty buffers within the standby buffer 60. On the basis of the acquired numbers of loaded substrates and empty buffers, it is switched whether to regulate throwing of the substrate 9 into the stagnation inhibition area 200. Thus, without depending on the scheduler, the substrate 9 is prevented from being stagnated in the stagnation inhibition area 200, thereby suppressing the generation of the processing defect.SELECTED DRAWING: Figure 1

Seiji Uebayashi
Osamu Toshinori

JP2014193086A

August 15, 2018

September 22, 2014

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Screen Holdings Co., Ltd.

H01L21/02; G05B19/418; H01L21/027; H01L21/304; H01L21/677

JP11260883A
JP2011091197A
JP2004253701A
JP2007335494A
JP2003108213A

US6491451

Takami Nishida

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