Title:
基板処理装置
Document Type and Number:
Japanese Patent JP4223293
Kind Code:
B2
Inventors:
Kazuki Kajino
Takashi Kawamura
Takashi Kawamura
Application Number:
JP2003011111A
Publication Date:
February 12, 2009
Filing Date:
January 20, 2003
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
B08B3/02; H01L21/304
Domestic Patent References:
| JP2002282764A | ||||
| JP2002329705A |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita