Title:
基板処理装置
Document Type and Number:
Japanese Patent JP5220517
Kind Code:
B2
Inventors:
Masuhiro Masuda
Shigehiro Goto
Yasuhiro Shiba
Masao Tsuji
Shigehiro Goto
Yasuhiro Shiba
Masao Tsuji
Application Number:
JP2008218316A
Publication Date:
June 26, 2013
Filing Date:
August 27, 2008
Export Citation:
Assignee:
Sokudo corporation
International Classes:
H01L21/027; B05C9/14; F26B3/20; F26B9/06; H01L21/02
Domestic Patent References:
| JP2005093727A | ||||
| JP2007335752A | ||||
| JP11317339A | ||||
| JP10247674A | ||||
| JP2008141163A | ||||
| JP2007220983A |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita