Title:
基板処理方法および基板処理装置
Document Type and Number:
Japanese Patent JP5451037
Kind Code:
B2
Inventors:
Yousuke Okutani
Application Number:
JP2008298467A
Publication Date:
March 26, 2014
Filing Date:
November 21, 2008
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
H01L21/304; G02F1/13; G11B7/26; H01L21/027; H01L21/306
Domestic Patent References:
| JP2002343759A | ||||
| JP2000150439A |
Attorney, Agent or Firm:
Inaoka cultivation
Mio Kawasaki
Mio Kawasaki