PURPOSE: To improve visible-radiation permeability and heat-ray shielding capacity by interposing a transparent metallic nitride layer between first and second metallic oxide dielectric layers with transparent high refractive indexes of specific refractive indexes which are superposed on one side of a transparent base, and obtaining high visible-radiation permeability.
CONSTITUTION: A stannic oxide film 2 having a thickness of 620, a zirconium nitride film 3 having a thickness of 170, and a stannic oxide film 4 having a thickness of 570 are formed in order on the surface of a glass plate 1 each by means of a sputtering method. Also, the stannic oxide films 2, 4 are formed by sputtering under a current of 2.5A by applying -400V to a metallic tin target in an argon gas including a pressure-reduced 80vol.% oxygen gas. The zirconium nitride film 3 is formed by sputtering under a current of 1.8A by applying -330V to a zirconium target in an argon gas including a pressure- reduced nitrogen gas. Thereby, a heat ray shielding board having durability can be obtained.
NAKAI HIDEMI
KAWAGUCHI ATSUSHI
JPS63190742A | 1988-08-08 | |||
JPS63206333A | 1988-08-25 |