Title:
基板収納容器
Document Type and Number:
Japanese Patent JP6372871
Kind Code:
B2
Abstract:
[Solution] The present invention relates to a substrate storage container (1) that is provided with: a container main body (2), which stores a substrate (W), and which has at least one side open; and a removable cover body (3) capable of opening/closing an opening (5) of the container main body (2). In the substrate storage container (1), the inside of the container main body (2) is provided with a first holding section (12) having a first holding groove (12a) for holding a rear portion of the substrate (W), the inner side of the cover body (3) is provided with a second holding section (25) having a second holding groove (25a) for holding a front portion of the substrate (W), and at least the first holding groove (12a) of the first holding section (12) is configured from an alloy resin having a polycarbonate resin and a polybutylene terephthalate resin as main components.
Inventors:
Katsuhiko Kato
Hiroshi Mimura
Ken Hagano
Hiroshi Mimura
Ken Hagano
Application Number:
JP2017511488A
Publication Date:
August 15, 2018
Filing Date:
February 22, 2016
Export Citation:
Assignee:
Shin-Etsu Polymer Co., Ltd.
International Classes:
H01L21/673
Domestic Patent References:
| JP2002305239A |
Foreign References:
| WO2009107254A1 |
Attorney, Agent or Firm:
Mebuki International Patent Business Corporation
Hiroshi Hasegawa
Hiroshi Hasegawa