Title:
基板搬送装置
Document Type and Number:
Japanese Patent JP4349102
Kind Code:
B2
Inventors:
Nozomi Ishibashi
Application Number:
JP2003392707A
Publication Date:
October 21, 2009
Filing Date:
November 21, 2003
Export Citation:
Assignee:
Ihi Co., Ltd.
International Classes:
B65G13/04; B65G49/06; B65G39/00; H01L21/677; H01L21/68
Domestic Patent References:
| JP2002289678A | ||||
| JP3032738Y2 |
Attorney, Agent or Firm:
Masatake Shiga
Takashi Watanabe
Takashi Watanabe
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