Title:
基板搬送治具及び基板搬送装置
Document Type and Number:
Japanese Patent JP4230642
Kind Code:
B2
Abstract:
The present invention provides a substrate holder for holding and transferring a thin substrate, comprising a substrate support member having a recessed area for placing a thin substrate therein and substrate mount portions formed in the recessed area in the vicinity of a circumferential edge thereof. The substrate mount portions is adapted to be engaged with an outer circumferential portion of a backside of the substrate placed in the recessed area. The substrate holder further comprises a substrate detector for detecting presence or absence of the substrate in the recessed area.
Inventors:
Hiroo Suzuki
Kenya Ito
Kunihiko Sakurai
Satoshi Wakabayashi
Tetsuji Togawa
Kenya Ito
Kunihiko Sakurai
Satoshi Wakabayashi
Tetsuji Togawa
Application Number:
JP2000183137A
Publication Date:
February 25, 2009
Filing Date:
June 19, 2000
Export Citation:
Assignee:
Ebara Corporation
International Classes:
B65D85/86; H01L21/677; B25J13/08; B25J15/00; B25J15/08; B25J19/02; B65G49/07; H01L21/00; H01L21/304; H01L21/687
Domestic Patent References:
| JP10175734A | ||||
| JP11116047A | ||||
| JP7201947A | ||||
| JP7147317A | ||||
| JP9172050A | ||||
| JP63089242U |
Attorney, Agent or Firm:
Takashi Kumagai
Yu Takagi
Yu Takagi