Title:
基板搬送ロボット
Document Type and Number:
Japanese Patent JP7015394
Kind Code:
B2
Abstract:
A substrate transfer robot delivers/receives a substrate to/from the carrier for the substrate, coupled to an opening of the load port on a first side of the load port, from a second side opposite to the first side via the load port through the opening, and the substrate transfer robot includes a hand holding the substrate, a robot arm coupled to the hand and displacing the hand, an imaging device attached to the hand or the robot arm, and a controller configured to control operation of the robot arm and the imaging device. Controller acquires a captured image including a peripheral edge of the opening and carrier coupled to the opening and performs image processing on captured image to detect deviation of the coupling position of the carrier from a predetermined reference coupling position, the peripheral edge and the carrier being captured from the second side by the imaging device.
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Inventors:
Tetsuya Yoshida
Zen, Min
Ichi Nakahara
Zen, Min
Ichi Nakahara
Application Number:
JP2020539415A
Publication Date:
February 02, 2022
Filing Date:
August 23, 2019
Export Citation:
Assignee:
Kawasaki Heavy Industries, Ltd.
Kawasaki Robotics (USA), Inc.
Kawasaki Robotics (USA), Inc.
International Classes:
H01L21/677; B25J9/10
Domestic Patent References:
| JP201851670A | ||||
| JP2002224982A | ||||
| JP2011134898A |
Foreign References:
| WO2011062138A1 |
Attorney, Agent or Firm:
Aiko Patent Office, a patent business corporation
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