Title:
基板作業装置
Document Type and Number:
Japanese Patent JP6957331
Kind Code:
B2
Abstract:
To provide a substrate work device capable of measuring for determination without need for vibrating a conveyor belt.SOLUTION: A substrate work device 100 includes: a convey belt 21 for conveying a substrate P; a tension state measurement section 8 for measuring a tension state of the conveyor belt 21 by pressing the conveyor belt 21 from the above to be deformed in the pressing-in direction; and control section 7 for determining the tension state of the conveyor belt 21 on the basis of the measurement value acquired by deformation of the conveyor belt 21 in the pressing-in direction by the tension state measurement section 8.SELECTED DRAWING: Figure 4
Inventors:
Ken Taniguchi
Application Number:
JP2017234545A
Publication Date:
November 02, 2021
Filing Date:
December 06, 2017
Export Citation:
Assignee:
YAMAHA HATSUDOKI KABUSHIKI KAISHA
International Classes:
H05K13/02; B65G23/44; B65G43/02
Domestic Patent References:
| JP2014041864A | ||||
| JP2000275124A | ||||
| JP2014075510A | ||||
| JP2008026191A | ||||
| JP2009117433A | ||||
| JP2017117889A |
Attorney, Agent or Firm:
Hirokazu Miyazono