Title:
BOAT FOR HEAT TREATMENT AND VERTICAL TYPE HEAT TREATMENT APPARATUS
Document Type and Number:
Japanese Patent JP3881567
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To prevent the dropping, falling down, and damage of a single-legged boat and to improve the antiseismic property thereof by reliably connecting a leg and a rotating shaft of the boat.
SOLUTION: The boat 16 for heat treatment comprises a main body 17 which supports a plurality of work pieces w in multiple stages in the vertical direction, and the single leg 18 connected to the rotating shaft 27 for rotating the main body 17 in the circumferential direction of the work piece w. The main body 17 and the leg 18 are integrally formed. A flange 19 is formed in the linkage of the leg 18 where the leg 18 is connected with the rotating shaft 27, and the flange 19 is formed with a hole 21 for tightening the flange 19 to the rotating shaft 27 by a screw 20.
Inventors:
Takayo Asano
Manabu Honma
Tomohisa Shimazu
Manabu Honma
Tomohisa Shimazu
Application Number:
JP2002058262A
Publication Date:
February 14, 2007
Filing Date:
March 05, 2002
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
C23C16/458; H01L21/31; H01L21/22; H01L21/324; (IPC1-7): H01L21/31; C23C16/458; H01L21/22; H01L21/324
Domestic Patent References:
| JP7321050A | ||||
| JP8162447A | ||||
| JP7201769A | ||||
| JP2000021799A | ||||
| JP6181176A |
Attorney, Agent or Firm:
Nobuo Kinutani
Noriyuki Kanasaka
Noriyuki Kanasaka
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