PURPOSE: To detect the concave and convex parts of the bodies accurately, by scanning the surface of the bodies to be measured by light beams and obtaining the distance to the bodies to be measured based on the positional relationship between an observing point and a light beam device by using a triangulation method.
CONSTITUTION: The laser light beams from a light source 8 are deflected by a scanning mirror 9 and reflected by the surfaces of the bodies to be measured 3A and 3B. The reflected light beams are inputted into light detectors 13a and 13b through a reflecting mirror 10, an image forming lens 11, and a prism mirror 12. A comparator 14 detects the coincidence of the outputs of both detectors, i.e. the coincidence of the reflected light from the bodies to be measured and an observing line 16. Meanwhile, scanning angles θ and θ1 are detected from the rotary angle of the scanning mirror. The distance (Dy+Bx) or (Dy+ Ax) is obtained from said angles θ and θ1 and the distance Dx by the principle of the triangulation. In this way, the displacements, concave and convex surfaces, and the like of the bodies to be measured are detected.
MITA KIKUO
KAKIGI GIICHI
| JPS5126050A | 1976-03-03 | |||
| JPS519623A | 1976-01-26 |