Title:
BOLOMETER AND METHOD FOR MANUFACTURING THE SAME
Document Type and Number:
Japanese Patent JP2022174871
Kind Code:
A
Abstract:
To provide a bolometer having a high TCR value and low resistance and a method for manufacturing the same.SOLUTION: According to the present invention, a method for manufacturing a bolometer is provided that includes the processes of fabricating an intermediate layer on a substrate in a predetermined shape that functions to enhance the bonding between the substrate and carbon nanotubes, and moving a semiconductor-type carbon nanotube dispersion in one direction relative to the intermediate layer on the fabricated intermediate layer.SELECTED DRAWING: Figure 2
Inventors:
KOSAKA MAYUMI
Application Number:
JP2021080882A
Publication Date:
November 25, 2022
Filing Date:
May 12, 2021
Export Citation:
Assignee:
NEC CORP
International Classes:
H01L35/34; C01B32/159; C01B32/17; C01B32/172; G01J1/02; H01L29/06; H01L31/08; H01L35/00; H01L35/22
Attorney, Agent or Firm:
Katsuhiro Ito
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