BRANCHED SILOXANES AND METHODS FOR SYNTHESIS

Title:

BRANCHED SILOXANES AND METHODS FOR SYNTHESIS

Document Type and Number:

Japanese Patent JP2016014159

Kind Code:

A

Abstract:

PROBLEM TO BE SOLVED: To provide branched and functionalized siloxanes and methods for making such compounds.SOLUTION: The present invention describes branched and functionalized siloxanes and methods for making such compounds. The compounds have a variety of uses. One preferred application is as novel planarizing material for lithography, in which case functionalized branched siloxane such as an epoxy-modified branched siloxane is particularly useful. In one embodiment, the present invention contemplates spin coating formulations comprising functionalized branched siloxanes onto patterned substrates.

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Inventors:

C GRANT WILLSON
OGAWA TSUYOSHI
MICHAEL B JACOBSSON

Application Number:

JP2015209855A

Publication Date:

January 28, 2016

Filing Date:

October 26, 2015

Export Citation:

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Assignee:

UNIV TEXAS

International Classes:

C08G77/06; C08G77/14; C08G77/20

Attorney, Agent or Firm:

Hidesaku Yamamoto
Natsuki Morishita

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