Title:
ブレーク装置
Document Type and Number:
Japanese Patent JP6967276
Kind Code:
B2
Abstract:
Provided is a brake device capable of preferably checking the parallelism of a blade edge of a brake plate. For each of a plurality of different measurement points of the blade edge, while a blade edge position sensor is placed so that a detection surface is located just below the measurement point due to the horizontal movement of a table and the in-plane rotation of an in-plane rotation part, the present invention lowers the brake plate from a predetermined initial position, measures the displacement of the brake plate from the initial position when the brake plate is in contact with or near the detection surface, obtains the maximum difference value which is the maximum value of the difference value between a reference displacement amount and a displacement amount at another measurement point when a displacement amount for one predetermined measurement point among the plurality of measurement points is made into the reference displacement amount, determines that the parallelism of the blade edge is sufficient when the maximum difference value is within a predetermined threshold, and determines that the parallelism of the blade edge is not sufficient when the maximum difference value exceeds the threshold.
Inventors:
Makoto Takeda
Kazuo Hayashi
Jun Yamamoto
Kazuo Hayashi
Jun Yamamoto
Application Number:
JP2017252868A
Publication Date:
November 17, 2021
Filing Date:
December 28, 2017
Export Citation:
Assignee:
Samsung Diamond Industry Co., Ltd.
International Classes:
B28D5/00; B26D5/00; B26D7/26; B26F3/00; C03B33/033; C03B33/037; G01B21/00; G01B21/22; H01L21/301
Domestic Patent References:
| JP201739272A | ||||
| JP2014145776A | ||||
| JP2017017087A | ||||
| JP2010135484A |
Foreign References:
| WO2006040988A1 |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita