Title:
ブレーク溝の加工方法及び加工装置
Document Type and Number:
Japanese Patent JP4183313
Kind Code:
B2
Inventors:
Mihiro Shigetomi
Application Number:
JP31970198A
Publication Date:
November 19, 2008
Filing Date:
November 11, 1998
Export Citation:
Assignee:
Sumitomo Metal Electro Device Co., Ltd.
MURATA MANUFACTURING CO.,LTD.
MURATA MANUFACTURING CO.,LTD.
International Classes:
B28B11/10; H01L23/12; B28B17/00
Domestic Patent References:
| JP10086128A | ||||
| JP7245359A | ||||
| JP3245556A | ||||
| JP63141712U | ||||
| JP52144013A |
Attorney, Agent or Firm:
Muneo Kako