Title:
ドレッサーディスク洗浄用ブラシ、洗浄装置及び洗浄方法
Document Type and Number:
Japanese Patent JP5887227
Kind Code:
B2
Abstract:
The present invention provides a cleaning brush and a cleaning apparatus that can effectively discharge dust, removed from a dresser disk of a CMP apparatus upon cleaning the dresser disk, to the outside of the cleaning system in order to prevent the dust from being again deposited on the dresser disk. A cleaning brush includes a large number of brushes formed to protrude on its top surface, vertical through-holes and into which a nozzle for ejecting a cleaning fluid is inserted, and a recessed groove formed on a lower surface that lower ends of the through-holes and face. It is configured such that dust deposited onto the brushes upon cleaning the dresser disk is discharged to outside from the recessed groove through a gap between the surrounding of the nozzle and the inner surface of the through-holes and together with the cleaning fluid.
Inventors:
Hiroyuki Shinozaki
Application Number:
JP2012174863A
Publication Date:
March 16, 2016
Filing Date:
August 07, 2012
Export Citation:
Assignee:
Ebara Corporation
International Classes:
B08B1/00; B24B37/34; B24B37/00
Domestic Patent References:
| JP11254294A | ||||
| JP2002079461A | ||||
| JP2001260024A | ||||
| JP2010016098A |
Attorney, Agent or Firm:
Takeuchi/Ichizawa International Patent Office