Title:
電熱作動を使用する座屈梁双安定マイクロ電子機械スイッチ
Document Type and Number:
Japanese Patent JP4143066
Kind Code:
B2
Abstract:
A microelectromechanical system (MEMS) that includes a first electro-thermal actuator, a second electro-thermal actuator and a beam having a first side and a second side. The first electro-thermal actuator applies a force to the first side of the beam as current passes through the first electro-thermal actuator and the second electro-thermal actuator applies a force to the second side of the beam as current passes through the second electro-thermal actuator.
Inventors:
Martin
Application Number:
JP2004529474A
Publication Date:
September 03, 2008
Filing Date:
August 13, 2003
Export Citation:
Assignee:
INTEL CORPORATION
International Classes:
B81B3/00; H01H61/00; H01H1/00; H01H37/54; H01H61/01
Domestic Patent References:
| JP54090585A | ||||
| JP63073554A | ||||
| JP2000190298A | ||||
| JP2002509332A | ||||
| JP2004025437A | ||||
| JP2003062798A |
Attorney, Agent or Firm:
Akihiro Ryuka
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