Title:
バルク音響波共振器及びその製造方法並びにフィルタ、無線周波数通信システム
Document Type and Number:
Japanese Patent JP7194476
Kind Code:
B2
Abstract:
A bulk acoustic resonator and a manufacturing method therefor, a filter, and a radio frequency communication system. A bottom electrode protruding portion (1041) formed on the periphery of a piezoelectric resonating layer (1051) and suspended above a cavity (102) is capable of protecting a transverse wave generated by the piezoelectric resonating layer (1051) from being transmitted to the periphery of the cavity (102), and reflecting the transverse wave back to an effective working zone (102A), thereby reducing the acoustic loss, increasing a quality factor of the resonator, finally improving the device performance. Furthermore, the parts where a bottom electrode overlapping portion (1040) and a top electrode overlapping portion (1070) overlap with the cavity (102) are suspended, and the bottom electrode overlapping portion (1040) and the top electrode overlapping portion (1070) are staggered, which can greatly reduce parasitic parameters, avoid problems such as leakage and short circuit, and improve the device reliability.
Inventors:
Luo Hailong
Application Number:
JP2021525816A
Publication Date:
December 22, 2022
Filing Date:
September 10, 2019
Export Citation:
Assignee:
NINGBO SEMICONDUCTOR INTERNATIONAL CORPORATION(SHANGHAI BRANCH)
International Classes:
H03H9/17; H03H3/02; H03H9/54
Domestic Patent References:
| JP2008236743A | ||||
| JP2008153797A | ||||
| JP2009124640A | ||||
| JP2006211296A |
Attorney, Agent or Firm:
Goto Patent Office