Title:
BUTSURIRYO DENKIHENKANHANDOTAISOCHI
Document Type and Number:
Japanese Patent JPS5184278
Kind Code:
A
Inventors:
HARA KUNIHIKO
TOYOSHIMA MASAHARU
TOYOSHIMA MASAHARU
Application Number:
JP947275A
Publication Date:
July 23, 1976
Filing Date:
January 21, 1975
Export Citation:
Assignee:
NIPPON DENSO CO
International Classes:
G01D3/028; G01R19/32; H01L31/00; H01L43/00; H01L49/00; (IPC1-7): G01D3/04; G01R19/32; H01L31/00; H01L49/00