Title:
CMP研磨液
Document Type and Number:
Japanese Patent JP4555936
Kind Code:
B2
Inventors:
Keizo Hirai
Satoshi Akahori
Torasuke Ashizawa
Kurihara Miho
Satoshi Akahori
Torasuke Ashizawa
Kurihara Miho
Application Number:
JP20599699A
Publication Date:
October 06, 2010
Filing Date:
July 21, 1999
Export Citation:
Assignee:
Hitachi Chemical Co., Ltd.
International Classes:
H01L21/304; B24B37/00; C09K3/14; C09K13/00; H01L21/306
Domestic Patent References:
| JP11021546A | ||||
| JP10058314A | ||||
| JP10046140A | ||||
| JP9137155A |
Foreign References:
| WO1998054756A1 | ||||
| WO1997029510A1 |
Attorney, Agent or Firm:
Hidekazu Miyoshi