Title:
CALIBRATION METHOD AND DEVICE FOR MEASURING DEVICE
Document Type and Number:
Japanese Patent JP3215325
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To easily calibrate the arm length, the stylus height, and a radius of a pointed end of the stylus in a short time by tracing a reference gauge of a measuring device by the stylus to obtain the surface roughness of a work, and an outline shape, and comparing and operating the data with a known value of the reference gauge master shape part.
SOLUTION: The set values of the stylus height, the arm length and a radius of a pointed end of the stylus, are inputted, and a reference gauge having a master shape part symmetrical to an axis in a detecting direction, of the stylus, is measured by tracing the same by the stylus. The calculation shape value of the master shape part, for example, a ball, is calculated by using the obtained data and the input set values, the stylus height is temporality calibrated on the basis of the difference in the lateral direction, and the arm length is temporality calibrated on the basis of the difference in the vertical direction. The calculation reference height of the reference gauge is calculated, and the arm length is calibrated to the known value. Then the difference in the lateral direction of the calculation shape value is calculated to calibrate the stylus height. The radius of the pointed end of the stylus is calibrated on the basis of the difference between the calculation shape value of the master shape part after the calibration, and the known shape value.
Inventors:
Masafumi Setaka
Application Number:
JP16819496A
Publication Date:
October 02, 2001
Filing Date:
June 07, 1996
Export Citation:
Assignee:
Tokyo Seimitsu Co., Ltd.
International Classes:
G01B5/00; G01B5/28; G01B7/34; G01B21/00; G01B21/20; (IPC1-7): G01B5/00; G01B5/28; G01B7/34; G01B21/20
Domestic Patent References:
JP8338718A | ||||
JP1202611A | ||||
JP843078A | ||||
JP60181601A | ||||
JP5272963A |
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