Title:
キャンロールと長尺基板処理装置
Document Type and Number:
Japanese Patent JP6965683
Kind Code:
B2
Abstract:
[Object] Provided are a can roll that prevents leakage of a cooling gas from a non-wrapped portion region on a can roll 56 on which a long substrate is not wrapped, and a long substrate treatment apparatus using this can roll.[Solving Means] A can roll with a gas discharge mechanism that selectively supplies the gas to a plurality of gas introduction channels 14 provided in the can roll through a rotary joint 20 including a rotary ring unit 21 and a fixed ring unit 22 including slide surfaces is characterized in that an arched packing member 42 fitted in an annular recessed groove 27a in the fixed ring unit closes revolving opening portions 23a provided at the slide surface of the rotary ring unit to thereby prevent gas leakage from the non-wrapped portion region, and the employed arched packing member includes end-portion inclined surfaces 42b on one surface facing the gas control sliding contact surface of the rotary ring unit. When the packing member is fixed in a pressed state, the end-portion inclined surfaces 42b operate so as to avoid floating of end portions of the packing member.
Inventors:
Hideharu Ogami
Application Number:
JP2017201081A
Publication Date:
November 10, 2021
Filing Date:
October 17, 2017
Export Citation:
Assignee:
Sumitomo Metal Mining Co., Ltd.
International Classes:
C23C14/56; C23C16/54
Domestic Patent References:
| JP2017137543A | ||||
| JP2012132081A | ||||
| JP2016079494A |
Attorney, Agent or Firm:
Akira Ueda
Masahiro Koizumi
Masahiro Koizumi