Title:
CAPACITANCE TYPE ACCELERATION SENSOR
Document Type and Number:
Japanese Patent JP3036681
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an optimum acceleration sensor for such application as an automobile where usage temperature range is wide and strict by preventing the output for a detection acceleration from being affected even if ambient temperature fluctuates in the acceleration sensor utilizing capacitance change for simultaneously detecting the acceleration of at least two axes.
SOLUTION: By changing the support structure by beams 2 of a flexible substrate 1 from the conventional layout on the center line of a flexible substrate to that in the outer-periphery part, the number of anode joint points between the flexible substrate 1 and a weight body 3 is changed from the conventional four on the lower surface of the substrate to one at the center to optimally adjusting the joint area. Further, by essentially arranging the electrodes for X, Y, and Z axes in the outer-periphery part, the capacitance type acceleration sensor which essentially is not affected by the change in ambient temperature, namely the influence due to thermal deformation can be obtained.
Inventors:
Ayumu Takahashi
Application Number:
JP30065095A
Publication Date:
April 24, 2000
Filing Date:
October 24, 1995
Export Citation:
Assignee:
Sumitomo Precision Products Co., Ltd.
International Classes:
G01P21/00; B81B3/00; G01P15/125; G01P15/18; (IPC1-7): G01P15/125
Domestic Patent References:
| JP743380A | ||||
| JP7218533A | ||||
| JP4148833A |
Attorney, Agent or Firm:
Yoshihisa Oshida