容量式物理量検出装置 - 株式会社デンソー

Title:

容量式物理量検出装置

Document Type and Number:

Japanese Patent JP5369819

Kind Code:

B2

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Inventors:

Nobuaki Kadani

Application Number:

JP2009078487A

Publication Date:

December 18, 2013

Filing Date:

March 27, 2009

Export Citation:

Assignee:

株式会社デンソー

International Classes:

G01P15/125; G01P21/00; H01L29/84

Domestic Patent References:

Attorney, Agent or Firm:

Yoji Ito
Takahiro Miura
Fumihiro Mizuno

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