Title:
容量式物理量センサ
Document Type and Number:
Japanese Patent JP5900439
Kind Code:
B2
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Inventors:
Sakai Mineichi
Keisugi Sugimoto
Keisugi Sugimoto
Application Number:
JP2013188181A
Publication Date:
April 06, 2016
Filing Date:
September 11, 2013
Export Citation:
Assignee:
株式会社デンソー
International Classes:
G01P15/125; G01P15/08; G01P21/00; H01L29/84
Domestic Patent References:
| JP2012242201A | ||||
| JP2010232431A | ||||
| JP2010185721A | ||||
| JP2008107108A | ||||
| JP2004510984A |
Foreign References:
| WO2011024576A1 |
Attorney, Agent or Firm:
Patent Business Corporation Yuai Patent Office