Title:
静電容量型トランスデューサ及びその作製方法
Document Type and Number:
Japanese Patent JP6381195
Kind Code:
B2
Abstract:
A capacitance type transducer includes a plurality of cells each having a structure in which a vibrating film is supposed so as to be vibrated. The vibrating film includes: a second electrode formed so that a gap is interposed between the second electrode and a first electrode; and an insulating film formed on the second electrode. The capacitance transducer manufacturing method includes: forming a sacrificial layer on the first electrode; forming a layer including a vibrating film on the sacrificial layer; forming an etching hole to remove the sacrificial layer; and forming a sealing film for sealing the etching hole. Before forming the etching hole to remove the sacrificial layer, a through hole is formed in an insulating film on the second electrode, and a conductor film is formed on the insulating film having the through hole to electrically connect a conductor in the through hole and the second electrode.
Inventors:
Takahiro Akiyama
Kazutoshi Torashima
Kazutoshi Torashima
Application Number:
JP2013218822A
Publication Date:
August 29, 2018
Filing Date:
October 22, 2013
Export Citation:
Assignee:
Canon Inc
International Classes:
H04R31/00; B81C1/00; H04R19/00
Domestic Patent References:
| JP2012222514A | ||||
| JP2012222785A | ||||
| JP2011259371A | ||||
| JP2011124973A | ||||
| JP2005175791A |
Foreign References:
| WO2013111040A1 |
Attorney, Agent or Firm:
Kazuo Kato