Title:
静電容量型トランスデューサ及びその製造方法
Document Type and Number:
Japanese Patent JP6494248
Kind Code:
B2
Inventors:
Kazuhiko Kato
Application Number:
JP2014226610A
Publication Date:
April 03, 2019
Filing Date:
November 07, 2014
Export Citation:
Assignee:
Canon Inc
International Classes:
H04R31/00; A61B8/13; H01L29/84; H04R19/00
Domestic Patent References:
| JP2013214845A | ||||
| JP2002343979A | ||||
| JP2010223850A |
Attorney, Agent or Firm:
Takuma Abe
Sogo Kuroiwa
Sogo Kuroiwa