Title:
CAPACITIVE TRANSDUCER, AND METHOD OF MANUFACTURING THE SAME
Document Type and Number:
Japanese Patent JP2016039476
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a technique for achieving a structure capable of controlling the cell diameter of a capacitive transducer accurately, while suppressing a step between a connection and the vibrating membrane of a cell even when an inter-cell connection is formed.SOLUTION: A capacitive transducer has a plurality of cells each having a structure including a vibrating membrane 105 which includes a first electrode 102, and a second electrode 106 separated therefrom by a gap 109. The capacitive transducer is formed using a substrate where a first layer including a part becoming the first electrode, a second layer including a part becoming a gap be etching, and a third layer including a part of the vibrating membrane are formed. Connections 118, 119 for connection with a cell, and a groove 122 defining the cell are formed up to the third layer 115, and on the sidewall of the groove on the cell and connection side, an insulating film 112, i.e., a support for supporting the vibrating membrane and connection, is formed. The gap 109 is formed by etching the second layer, and the connection and cell are connected while being contained in the third layer commonly.SELECTED DRAWING: Figure 1
Inventors:
ZHANG JIANLIU
Application Number:
JP2014161301A
Publication Date:
March 22, 2016
Filing Date:
August 07, 2014
Export Citation:
Assignee:
CANON KK
International Classes:
H04R19/00; A61B8/00; G01N29/24; H04R31/00
Attorney, Agent or Firm:
Kazuo Kato