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Patent Searching and Data


Title:
CAPACITOR OF INTEGRATED CIRCUIT
Document Type and Number:
Japanese Patent JPH04268756
Kind Code:
A
Abstract:

PURPOSE: To enable a capacitor to be enhanced in capacitance by a method wherein one of a pair of opposed electrodes confronts the other electrode through the intermediary of a dielectric in an upper wiring layer, a lower wiring layer, and between the upper and the lower wiring layer.

CONSTITUTION: A lower wiring layer 20 and an upper wiring layer 21 are formed on a board 10 through the intermediary of an interlayer insulating film 11. In the lower wiring layer 20 and the upper wiring layer 21, the electrodes A and B are so arrange as to enable their comb-toothed parts to be engaged with each other. Furthermore, in the upper wiring layer 21, the comb-toothed parts of the electrodes are arranged in AB, AB order, and in the lower wiring layer 20, the comb-toothed parts of the electrodes are arranged in BA, BA order. Therefore, the electrode A of the lower wiring layer 20 confronts the electrode B of the lower wiring layer 21, and the electrode B of the lower wiring layer 21 confronts the electrode A of the lower wiring layer 20. Charge is stored in these three planes, so that a capacitor of this design can be enhanced in electrode area.


Inventors:
KONDO HARUFUSA
NOTANI HIROMI
Application Number:
JP2996191A
Publication Date:
September 24, 1992
Filing Date:
February 25, 1991
Export Citation:
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Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
H01L27/04; H01L21/822; (IPC1-7): H01L27/04
Attorney, Agent or Firm:
Fukami Hisaro (3 outside)