Title:
CAPACITY INSPECTION PROBE FOR CAPACITANCE TYPE HUMIDITY SENSOR
Document Type and Number:
Japanese Patent JP2016151551
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a technique and a device for inspecting capacitance and an electrostatic loss coefficient in a stage of individual humidity sensing elements after a wafer dicing step since inspection associated with characteristics of a humidity sensing element such as capacitance and an electrostatic loss coefficient is performed after individual humidity sensing elements cut out of a glass wafer in the dicing step are formed into package products and if a defective is found in the inspection, the package product itself as the defective is hard to repair or correct and needs to be removed.SOLUTION: The present invention relates to a capacity inspection probe for a capacitance type humidity sensor consisting of a first metal wire having a needle-like tip and a second metal wire comprising a metallic electrode tip part in a plane shape having specific surface area. Surface area of a plane of the metallic electrode tip part and surface area of a capacitor of the humidity sensing element have a predetermined area ratio.SELECTED DRAWING: Figure 1
Inventors:
FUKIURA TAKESHI
Application Number:
JP2015030623A
Publication Date:
August 22, 2016
Filing Date:
February 19, 2015
Export Citation:
Assignee:
AZBIL CORP
International Classes:
G01N27/22; G01N27/00