Title:
CAPACITY TYPE MEMS SENSOR AND METHOD OF MANUFACTURING THE SAME
Document Type and Number:
Japanese Patent JP2012040619
Kind Code:
A
Abstract:
To provide a capacity type MEMS sensor that does not require an additional process for forming a projection, and to provide a method of manufacturing the same.
A sacrifice layer 14 and a fixed electrode 15 are laminated on a diaphragm film 13 comprising a movable section. A through hole 17 is formed in the fixed electrode, and isotropic etching is carried out from the through hole. This leaves a part of the sacrifice layer on the diaphragm film at a position which is the most distant from the through hole. By using the part of the sacrifice layer as the projection 21, the movable section is prevented from being adhered to the fixed electrode.
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Inventors:
TAKAHASHI HIROSHI
OCHIAI YOSUKE
OCHIAI YOSUKE
Application Number:
JP2010181191A
Publication Date:
March 01, 2012
Filing Date:
August 13, 2010
Export Citation:
Assignee:
NEW JAPAN RADIO CO LTD
International Classes:
B81B3/00; B81C1/00; G01L9/00; H01L29/84; H04R19/00; H04R31/00
Domestic Patent References:
JP2009028806A | 2009-02-12 | |||
JPH10512675A | 1998-12-02 |
Foreign References:
WO2008001252A2 | 2008-01-03 |