Title:
CAPILLARY AND CAPILLARY REGENERATING METHOD
Document Type and Number:
Japanese Patent JP2005197417
Kind Code:
A
Abstract:
To provide a capillary regenerating method for regenerating a capillary by removing a substance with which the capillary is filled in short time, and to provide the capillary.
It is judged whether the capillary 100 can be regenerated or not from a tip 100a of the capillary 100. When it is judged that the capillary can be regenerated, the substances 200 and 400 existing in a through hole 100d inside the capillary 100 are dissolved, and the substances 200 and 400 are removed.
Inventors:
HATTORI OSAMU
Application Number:
JP2004001341A
Publication Date:
July 21, 2005
Filing Date:
January 06, 2004
Export Citation:
Assignee:
SEIKO INSTR INC
International Classes:
H01L21/60; (IPC1-7): H01L21/60
Attorney, Agent or Firm:
Yoshiharu Matsushita
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