CAPPING DEVICE, ITS CONTROL METHOD, LIQUID DROPLET DISCHARGE DEVICE AND DEVICE MANUFACTURING METHOD

Title:

CAPPING DEVICE, ITS CONTROL METHOD, LIQUID DROPLET DISCHARGE DEVICE AND DEVICE MANUFACTURING METHOD

Document Type and Number:

Japanese Patent JP2005186352

Kind Code:

A

Abstract:

To provide a capping device which dissolves the clogging of a nozzle opening in a liquid droplet discharge head and other troubles in a short time while curbing the wasteful consumption of a liquid droplet solvent, a method for controlling the capping device, a liquid droplet discharge device and a device manufacturing method.

In the capping device, a capping unit 22 is equipped with a capping part 42 for sealing (capping) the nozzle opening formed in the discharge head 20. In such a state that the discharge head 20 is capped by the capping part 42, an area near the nozzle opening is heated by oscillating a piezoelectric element 150 fitted to the discharge head 20 and the interior of the capping part 42 is sucked by a pump 46 to discharge liquid droplets from the open nozzle.

Inventors:

USUDA HIDENORI

Application Number:

JP2003428492A

Publication Date:

July 14, 2005

Filing Date:

December 25, 2003

Export Citation:

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Assignee:

SEIKO EPSON CORP

International Classes:

B41J2/18; B05C5/00; B05C11/10; B05D1/26; B05D3/00; B41J2/165; B41J2/175; B41J2/185; G02F1/1341; (IPC1-7): B41J2/18; B05C5/00; B05C11/10; B05D1/26; B05D3/00; B41J2/175; B41J2/185

Attorney, Agent or Firm:

Kazuya Nishi
Masatake Shiga
Masakazu Aoyama

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