Title:
CARRIER MECHANISM WITH ELECTROSTATIC PRECIPITATOR
Document Type and Number:
Japanese Patent JPS59181635
Kind Code:
A
Abstract:
PURPOSE:To remove dust on the surface of a semiconductor wafer, etc. approximately completely and efficiently by mounting an electrode in arrangement approaching to the surface, applying voltage to the electrode and forming a dipole to dust and sucking dust to the electrode device side by an electrostatic effect. CONSTITUTION:With an electrode device 13 disposed to the upper section of a belt 11 so as to extremely approach to and be opposed to a material to be carried on its midway of a carrying path for a semiconductor wafer, etc. 12, pectinate electrode conductors 22, 23 separated into two are formed on the surface of a substrate such as an insulator substrate 21. A large number of dipoles are formed by applying voltage between the two pectinate conductors 22, 23 on the electrode device 13, and an electric field is shaped by these dipoles. Since the semiconductor wafer, etc. 12 pass in the electric field, dipoles are also generated in dust when insulating dust adheres on the surface of the wafer 12, and dust is attracted to the electrode device 13 by the attraction of electrostatic interactions.
Inventors:
WATANABE TOORU
HASEGAWA KOTOHIRO
HASEGAWA KOTOHIRO
Application Number:
JP5599083A
Publication Date:
October 16, 1984
Filing Date:
March 31, 1983
Export Citation:
Assignee:
TOSHIBA KK
International Classes:
B65G45/00; B03C7/02; B65G15/30; B65G45/10; B65G69/18; H01L21/00; H01L21/677; H01L21/68; H01L21/683; (IPC1-7): B03C3/00; B65G15/30; B65G45/00; B65G69/18
Attorney, Agent or Firm:
Takehiko Suzue