Title:
CARRIER MEMBER WITH CLEANING FUNCTION, AND METHOD FOR CLEANING SUBSTRATE TREATMENT APPARATUS USING THE SAME
Document Type and Number:
Japanese Patent JP2005342720
Kind Code:
A
Abstract:
To provide a carrier member with a cleaning function for substrate treatment apparatuses, which hate foreign substances, such as production apparatuses and inspection apparatuses for semiconductors, flat panel displays, printed boards and the like.
This carrier member with cleaning function is a carrier member for removing foreign substances by transfer into a substrate treatment apparatus and is characterized by comprising a cleaning layer formed of a material having a surface free energy of 15 to 30 mJ/m2 and an angle of contact with water of more than 90 degrees provided on the carrier member. In particular, in the above construction, a cleaning layer is provided directly on the carrier member.
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Inventors:
TERADA YOSHIO
NAMIKAWA AKIRA
NAMIKAWA AKIRA
Application Number:
JP2005242841A
Publication Date:
December 15, 2005
Filing Date:
August 24, 2005
Export Citation:
Assignee:
NITTO DENKO CORP
International Classes:
H01L21/304; H01L21/677; H01L21/68; B08B1/00; (IPC1-7): B08B1/00; H01L21/304; H01L21/68
Attorney, Agent or Firm:
祢▲ぎ▼元 邦夫