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Patent Searching and Data


Title:
CARRIER FOR POLISHING DEVICE
Document Type and Number:
Japanese Patent JPH11221756
Kind Code:
A
Abstract:

To provide a polishing device carrier that prevents works from jumping out, ensures its stable rotation during work polishing and causes almost no vibration, by lowering an aligning point.

The carrier main body 2 of a carrier 1, which is constituted of a housing 20, a pressure plate 21, a retainer ring 22, a packing sheet 23 and a vibration damper ring 4, is connected to a rotary shaft 3 by way of a universal joint 30. The housing 20 and pressure plate 21 are made thin so that the aligning point P is lowered, which results in a reduction in weight of the carrier main body 2. The vibration damper ring 4 is fixed to the circumference of the housing 20 on the top so that the vibration of the carrier main body 2 is suppressed while a platen 200 is rotated.


Inventors:
OU JIYOSHIN
IZUMI SHIGETO
Application Number:
JP4123298A
Publication Date:
August 17, 1999
Filing Date:
February 06, 1998
Export Citation:
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Assignee:
SPEEDFAM CO LTD
International Classes:
B24B7/24; B24B37/04; B24B37/30; (IPC1-7): B24B37/04
Attorney, Agent or Firm:
Takakazu Tsukahara