Title:
CERAMIC CARRIER
Document Type and Number:
Japanese Patent JPS59131583
Kind Code:
A
Abstract:
A heat conductive ceramic substrate for semiconductor circuits, comprising polycrystalline aluminum nitride of high density containing as an additive boron nitride or oxides of calcium, magnesium, aluminum, titanium, zirconium, chrome, silicon, and/or rare earth metals. The boron nitride additive concentration ranges between 0.1 and 3% by weight, preferably between 0.5 and 2% by weight. The oxide additive concentration ranges between 0.1 and 5% by weight. The substrate has a significantly higher thermal conductivity than aluminum oxide substrates and is more economincal to manufacture than beryllium oxide substrates.
Inventors:
FURITSUTSU ARUDEINGAA
RIHIYARUTO KAIRUBERUTO
BUARUTORAUTO BUERUDETSUKAA
RIHIYARUTO KAIRUBERUTO
BUARUTORAUTO BUERUDETSUKAA
Application Number:
JP24225483A
Publication Date:
July 28, 1984
Filing Date:
December 23, 1983
Export Citation:
Assignee:
HERAEUS GMBH W C
International Classes:
C04B35/58; C04B35/581; H01B3/12; H01L21/52; H01L23/14; H01L23/15; H05K1/03; (IPC1-7): C04B35/58; H01B3/12; H01L27/12
Domestic Patent References:
| JPS5832073A | 1983-02-24 | |||
| JPS5023411A | 1975-03-13 | |||
| JPS54100410A | 1979-08-08 | |||
| JPS5756384A | 1982-04-03 | |||
| JPS53117386A | 1978-10-13 |
Attorney, Agent or Firm:
Michiteru Soga