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Title:
セラミックス積層膜及びセラミックス積層膜の作製方法
Document Type and Number:
Japanese Patent JP7272671
Kind Code:
B2
Abstract:
First brittle material particles; and second brittle material particles having smaller size than the first brittle material particles, wherein a void formed between the first brittle material particles is filled with at least one of the second brittle material particles, at a porosity of less than 20%.

Inventors:
Muneyasu Suzuki
Akito Jun
Tetsuo Tsuchiya
Application Number:
JP2020523078A
Publication Date:
May 12, 2023
Filing Date:
May 31, 2019
Export Citation:
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Assignee:
National Institute of Advanced Industrial Science and Technology
International Classes:
B28B1/14; B32B18/00; C04B35/111; C23C24/02
Domestic Patent References:
JP2004261746A
JP2002143728A
JP5154976A
JP2006043993A
JP2005028248A
Foreign References:
WO2017199968A1
Attorney, Agent or Firm:
Patent Attorney Corporation Takahashi Hayashi and Partners