Title:
CERAMIC PASSAGE MEMBER
Document Type and Number:
Japanese Patent JP2017212328
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a ceramic passage member which has a structure where heat exchange with objects other than a processed product is inhibited and can efficiently cool or heat the processed product.SOLUTION: A ceramic passage member of the disclosure includes: a first surface on which a processed product is placed; a second surface positioned at an opposite side of the first surface; and a passage positioned between the first surface and the second surface and in which a fluid flows. The ceramic passage member has a cavity part between the passage and the second surface. The structure allows the ceramic passage member of the disclosure to efficiently cool or heat the processed product.SELECTED DRAWING: Figure 1
Inventors:
MAEDA KENJIRO
SEKIGUCHI KEIICHI
ISHIMINE YUSAKU
SEKIGUCHI KEIICHI
ISHIMINE YUSAKU
Application Number:
JP2016104399A
Publication Date:
November 30, 2017
Filing Date:
May 25, 2016
Export Citation:
Assignee:
KYOCERA CORP
International Classes:
H01L21/683; H01L21/3065
Domestic Patent References:
| JP2006525668A | 2006-11-09 | |||
| JP2003338492A | 2003-11-28 |
Foreign References:
| WO2014017661A1 | 2014-01-30 |
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