Title:
セラミック構造体及びセラミック構造体の製造方法
Document Type and Number:
Japanese Patent JP7195336
Kind Code:
B2
Abstract:
A heater includes a base body and an internal conductor. The base body is made of ceramic. The internal conductor is located inside the base body and includes a connection portion. The base body includes a space extending from the connection portion to a lower surface of the base body. The space includes a first space and a second space. The first space contacts with the connection portion. The second space connects the first space and an outer side of the lower surface of the base body, and is smaller than the first space in a planar perspective of the lower surface of the base body.
Inventors:
Yasunori Kawabe
Yusaku Ishimine
Takeshi Souseki
Yoshihiro Okawa
Yusaku Ishimine
Takeshi Souseki
Yoshihiro Okawa
Application Number:
JP2020557582A
Publication Date:
December 23, 2022
Filing Date:
November 20, 2019
Export Citation:
Assignee:
Kyocera Corporation
International Classes:
H01L21/683; B28B11/00; H05B3/02; H05B3/74
Domestic Patent References:
| JP2018016536A | ||||
| JP2013084938A | ||||
| JP2003179127A | ||||
| JP2008305968A | ||||
| JP2017153254A |
Attorney, Agent or Firm:
Yasuhiro Iijima