Title:
セラミック基板の製造方法
Document Type and Number:
Japanese Patent JP2005534606
Kind Code:
A
Abstract:
A method is disclosed for producing a ceramic substrate made of base that includes a stack of layers. Each layer in the stack includes a non-sintered ceramic material and a binder. The method includes debinding the layers in a temperature interval of TE1-TE3, where TE1 is a minimum debinding temperature and TE3>TE1, and sintering the layers at a temperature TS, where TS≧TE3. Debinding and sintering are performed in a same furnace, and a temperature T of the base does not fall below TE1 during debinding and sintering.
Inventors:
Anke Arthof
Holger Grabner
Holger Grabner
Application Number:
JP2004526627A
Publication Date:
November 17, 2005
Filing Date:
August 04, 2003
Export Citation:
Assignee:
EPCOS AG
International Classes:
B32B18/00; C04B35/638; C04B35/64; H01G4/12; H01L21/48; H05K1/16; H05K3/46; H05K1/03; (IPC1-7): C04B35/64; B32B18/00; C04B35/638; H05K3/46
Attorney, Agent or Firm:
Toshio Yano
Toshiomi Yamazaki
Takuya Kuno
Einzel Felix-Reinhard
Reinhard Einsel
Toshiomi Yamazaki
Takuya Kuno
Einzel Felix-Reinhard
Reinhard Einsel