Title:
CERAMIC SUBSTRATE FOR SEMICONDUCTOR PRODUCTION/ INSPECTION SYSTEM AND ITS PRODUCING METHOD
Document Type and Number:
Japanese Patent JP2003158053
Kind Code:
A
Abstract:
To provide a thin and light ceramic substrate for semiconductor production/inspection system in which the function of a conductor, e.g. the temperature in case of a heating element, can be reflected quickly on the action, e.g. the temperature, of the working surface of the substrate.
A planar or flat conductor is arranged in an insulating ceramic substrate comprising nitride ceramic or carbide ceramic. The conductor is arranged eccentrically from the substrate in the thickness direction and the surface remote from the conductor serves as a working surface (heating surface).
Inventors:
ITO YASUTAKA
FURUKAWA MASAKAZU
HIRAMATSU YASUJI
FURUKAWA MASAKAZU
HIRAMATSU YASUJI
Application Number:
JP2002205526A
Publication Date:
May 30, 2003
Filing Date:
June 09, 2000
Export Citation:
Assignee:
IBIDEN CO LTD
International Classes:
H05B3/20; H01L21/02; H01L21/027; H01L21/68; H01L21/683; H05B3/10; H05B3/74; (IPC1-7): H01L21/02; H01L21/027; H01L21/68; H05B3/10; H05B3/20; H05B3/74
Attorney, Agent or Firm:
Junzo Ogawa (1 person outside)
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