Title:
熱処理オーブンのチャンバー冷却ユニット
Document Type and Number:
Japanese Patent JP7139390
Kind Code:
B2
Abstract:
The chamber cooling unit of a heat treatment oven is disclosed. The present invention comprises: a heat treatment oven having a chamber for accommodating a substrate to heat or dry the substrate, and mounting a heating element of a heater in the chamber to heat or dry the substrate with the heat of the heater; a cooling air flow guide path formed along the inner and outer casings of the chamber; and at least one cooling jacket positioned vertically on the outer side surface of the chamber to form a cooling air flow in the cooling air flow guide path configured on the inside of the chamber.
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Inventors:
Kim Minchul
Nakanishi Satoru
Nakanishi Satoru
Application Number:
JP2020118020A
Publication Date:
September 20, 2022
Filing Date:
July 08, 2020
Export Citation:
Assignee:
Coyo Thermo System Korea Company Limited
International Classes:
F27D9/00; F27D1/12
Domestic Patent References:
| JP2018169077A |
Attorney, Agent or Firm:
Tomoharu Ashikita
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