Title:
Chamber equipment and processing system
Document Type and Number:
Japanese Patent JP6290686
Kind Code:
B2
Inventors:
Junichi Kaida
Application Number:
JP2014073561A
Publication Date:
March 07, 2018
Filing Date:
March 31, 2014
Export Citation:
Assignee:
Hirata Kiko Co., Ltd.
International Classes:
H01L21/205; C23C16/44; F16J13/22; H01L21/3065; H01L21/677
Domestic Patent References:
| JP54083021U | ||||
| JP55060761A | ||||
| JP2005253509A | ||||
| JP2013533437A | ||||
| JP2001008757A | ||||
| JP2011024630A |
Foreign References:
| US20110297683 |
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura