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Title:
CHAMBER PRESSURE CONTROL SYSTEM
Document Type and Number:
Japanese Patent JP2004177038
Kind Code:
A
Abstract:

To effectively restrain hunting of chamber pressure control means.

This chamber pressure control system has the chamber pressure control means 6B, 9A and 9B for adjusting chamber pressure (p) of an object chamber 1 to target chamber pressure ps by adjusting a balance between an air supply quantity and an air exhaust quantity to the object chamber 1, and is provided with a system preserving means 11 for changing an operation characteristic of the chamber pressure control means 6B, 9A and 9B to another characteristic from a present characteristic when the hunting is caused by detecting generation of the hunting H in the chamber pressure control means 6B, 9A and 9B.


Inventors:
SUKEMIYA KENJI
OGAWA MASAYUKI
Application Number:
JP2002345554A
Publication Date:
June 24, 2004
Filing Date:
November 28, 2002
Export Citation:
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Assignee:
TAIKISHA KK
International Classes:
F24F7/08; F24F11/04; (IPC1-7): F24F11/04; F24F7/08
Domestic Patent References:
JPH03207944A1991-09-11
JPH08332832A1996-12-17
JPH11294871A1999-10-29
JPS62238934A1987-10-19
JPH08202441A1996-08-09
JPH055552A1993-01-14
Attorney, Agent or Firm:
Shuichiro Kitamura



 
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